Tetra Methyl Ammonium Hydroxide Pentahydrate

Tetra Methyl Ammonium Hydroxide Pentahydrate

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Tetramethylammonium hydroxide pentahydrate (TMAH) is a chemical compound with the molecular formula (CH3)4NOH•5H2O. It is a white or colorless crystalline solid that is highly soluble in water and organic solvents.

TMAH pentahydrate is a strong base and is commonly used as a developer in the semiconductor industry for the wet etching of silicon and other materials. It is also used as a solvent in organic synthesis and as a reagent for the determination of elements such as boron and phosphorus.

In the semiconductor industry, TMAH pentahydrate is used as a developer to selectively remove layers of materials such as silicon dioxide and silicon nitride from silicon wafers. It is also used in photolithography processes to remove exposed photoresist.

In organic synthesis, TMAH pentahydrate is used as a solvent for the dissolution of various organic compounds and as a reagent for the deprotection of protective groups in organic molecules.

TMAH pentahydrate is a highly alkaline compound and should be handled with care. It can cause severe skin and eye irritation and can be harmful if ingested or inhaled. Appropriate protective equipment should be worn when handling TMAH pentahydrate, and it should be used only in a well-ventilated area.


1. What is tetramethylammoniumhydroxide pentahydrate, exactly?

Ans - Strong, colourless base known as tetra methyl ammonium hydroxide pentahydrate (TMAH) is frequently used in semiconductor production. Tetramethylammonium hydroxide and tetramethylammonium hydrate are other names for it.

2. What purposes does TMAH serve?

Ans - TMAH is frequently employed in the manufacture of semiconductors as a gate dielectric, a wet etch stop layer, and an etchant. Additionally, it serves as a cleaning agent and is utilised in chemical mechanical polishing.

3. Where is TMAH kept?

Ans - The best place to keep TMAH is somewhere cool, dry, and away from any heat sources. Additionally, it should be stored away from potent oxidising substances like chlorine and peroxides.

4. How harmful is TMAH?

Ans - Strong bases like TMAH can irritate the skin and eyes. When handling it, caution should be taken and safety gear should be worn.

5. How long does TMAH have a shelf life?

Ans - If TMAH is correctly stored, its shelf life is unbounded. But it must be frequently examined for contamination or deterioration.